Micro Linear Ultrasonic Motor With a Hall Sensor-Based Feedback Control System
We propose a one-millimeter-scale linear ultrasonic motor and its feedback control system with a Hall sensor.The size of the stator measures 1.6 mm in height, 1.6 mm in width, and 0.3 mm in thickness, and there is a hole with a diameter of 0.6 nutella christmas ornament mm at the center, which is one of the smallest linear motors reported to date.A